$32,900.00 $45,500.00
HOT SALE !!! Matrix System One Stripper Style 10X Plasma Asher Plasma Clean AWD-1-10, with 1 year warranty. The Matrix System One Stripper Style 10X (Model AWD-1-10) is an industry-standard, single-wafer downstream RF plasma asher and photoresist removal system originally manufactured by Matrix Integrated Systems, Inc.. It is designed primarily for low-damage photoresist stripping, descumming, and surface plasma cleaning during semiconductor fabrication.
| Feature | Specification |
|---|---|
| Wafer Capability | Configurable for 2-inch to 6-inch (50mm – 150mm) round or square substrates. |
| Plasma Architecture | Downstream Plasma (separates plasma generation from the wafer chuck to protect sensitive gate oxides and minimize direct ion bombardment/electrical damage). |
| RF Generator Source | 13.56 MHz RF power supply, typically water-cooled. |
| RF Process Power | Typically 250W – 600W operating range depending on recipe steps. |
| Process Gases | Multi-line Mass Flow Controller (MFC) manifold configured for Oxygen (Oâ‚‚) and Nitrogen (Nâ‚‚) gases. |
| Thermal Controls | Element heated platen/chuck with precise closed-loop temperature control ranging from 60°C to 250°C. |
| Wafer Handling | Automated, robotic cassette-to-cassette wafer processing system with pneumatic pin lift assembly. |
| Operating Pressure | Vacuum-sealed process chamber operating in the range of 1.0 to 6.5 Torr during active bulk strip phases. |
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