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Brooks-PRI Automation VAC-409-C

Condition : Seller refurbished

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$9,990.00

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For sale Brooks-PRI Automation VAC-409-C only $ 9.990. Come with 1 year warranty. This Equipe/PRI/Brooks vacuum wafer transfer robot, model VAC-409-CHAIN, is a highly sought-after tool in the semiconductor and PCB manufacturing industry. It is designed to efficiently transfer wafers during the manufacturing process. This particular unit is being sold for rebuild purposes only and is being offered at a great price. The brand is Brooks and it is a wet wafer transfer robot. The component type is a Vacuum Wafer Transfer Robot and it falls under the categories of Tool & Machine Components, Semiconductor & PCB Manufacturing Equipment, CNC, Metalworking & Manufacturing, and Business & Industrial.

Brooks-PRI Automation VAC-409-C Specifications & Architecture
  • Primary Function: High-purity substrate and semiconductor wafer handling. 
  • Environment Type: Vacuum (VAC) and Wet Process/Wet Wafer Transfer compatibility. 
  • Arm Linkage Mechanism: Uses a 9.625-inch Chain-drive mechanism for precise telescopic expansion. (Note: Complementary band-drive variations typically feature a 9.8-inch link). 
  • Supported Wafer Sizes: Capable of processing 1″, 2″, 4″, 6″, and 8″ (200mm) semiconductor wafers. 
  • Motion Drive: High-precision servo motors paired with integrated vacuum ports to manage payload security and repeatable path alignment. 
  • Physical Weight: Typically ranges between 35 to 85 lbs (15.88 to 38.56 kg) depending on the specific mounting flange configuration and Z-stroke mechanism options. 

Equipment Applications & Integration
  • Common Process Tools: Heavily utilized in legacy fab clusters, including multi-chamber systems like the Applied Materials (AMAT) Centura II processing tracks.
  • Modular Configuration Options: The baseline VAC-409 series architecture supports modular adjustments, which can be equipped with secondary components such as a substrate flipper, a single or dual-vacuum wand, and integrated wafer mapping sensors.

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