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Pfeiffer Vacuum THERMOstar Gas Analysis System Analyzer GSD 320 T3
Condition : Used
$12,100.00
Contact UsHot sale Pfeiffer Vacuum THERMOstar Gas Analysis System Analyzer GSD 320 T3 only $ 12.100. with 1 year warranty. The Pfeiffer Vacuum THERMOstar Gas Analysis System Analyzer GSD 320 T3 is a high-quality gas analysis system designed for semiconductor and PCB manufacturing equipment. With the brand name of Pfeiffer, this analyzer is known for its reliability and accuracy in measuring various gases within these manufacturing processes. This tool is essential for monitoring and controlling the composition of gases to ensure the quality of final products in the semiconductor industry.
Pfeiffer Vacuum THERMOstar Gas Analysis System Analyzer GSD 320 T3 Specifications
- System Type: Turnkey, integrated benchtop gas analyzer.Â
- Model Designation: GSD 320 T3
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- GSD 320: Base analyzer platform series.
- T (ThermoStar): Quartz capillary TGA-optimized inlet.
- 3: Refers to the 300 u mass range configuration.
- Mass Range: 1 – 300 u (amu).
- Mass Spectrometer Core: Built on the Pfeiffer Vacuum PrismaPlus quadrupole analyzer unit.Â
- Detectors: Dual detector system consisting of a Faraday detector and a C-SEM (Continuous Secondary Electron Multiplier).Â
- Filament/Cathode: Typically equipped with an Yttrium-coated Iridium or Tungsten filament configuration.Â
Gas Inlet & Sampling System
- Inlet Type: Continuously open, pressure-reducing quartz capillary line.
- Capillary Heating: Temperature-regulated up to 350 °C to prevent gas condensation.
- Capillary Material: Inert quartz surface ensures zero surface reactions or catalytic breakdown during high-temperature gas transfer.
- Orifice Type: Platinum orifice paired with the quartz capillary.
- Sample Pressure Range: Designed primarily for gas analysis at atmospheric pressure (1,000 hPa / 750 Torr).
Performance Characteristics
- Detection Limit: Lower than 100 ppb (parts per billion), depending on the specific gas matrix and mass range.
- Gas Consumption Rate: Minimal sampling flow rate of 1 – 2 sccm (standard cubic centimeters per minute).
- Measurement Speed: Fast scanning speeds down to 1 ms/u.
- Resolution: 0.5 – 2.5 u at 10% peak height.
Vacuum & Hardware Infrastructure
- Internal Pumps: Dry backing station containing an internal diaphragm vacuum pump mated with a Pfeiffer Vacuum HiPace turbomolecular pump.
- System Weight: Approximately 35 kg (77.16 lbs).
- Power Input: 100–230 V AC, 50/60 Hz; total power draw of roughly 590 W.
- Software Control: Operated through native Quadera control software or newer PV MassSpec processing platforms via Ethernet connection

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